Electron Microscopy

Electron Microscopy uses electrons instead of photons to create a high-resolution image of a sample. In Scanning Electron Microscopes (SEMs) the electrons are focused on a narrow beam that is scanned over the surface of the specimen to obtain information down to the nanometer scale. SEMs are also sometimes coupled with other types of particle beams such as Ga and Xe plasma Focused Ion Beams (FIBs). SEMs offer the ultrahigh resolution and versatility that empower today's microscopists to image and characterize a new generation of nanomaterials, capture biological details, analyze forensic evidence, create nanopatterns, and pinpoint problems in manufacturing processes.

Transmission Electron Microscopes (TEMs) are more similar to conventional optical microscopes in the way that the electron beam travels through a sample to form an image; electromagnetic lenses are used to magnify this image or display a diffraction pattern. With modern aberration-correction technology the achievable resolution is comparable to the radius of the smallest atom (0.05 nm). Like SEMs, TEMs have a wide variety of applications in all branches of science and are often used for multidisciplinary purposes among several research teams. Biologists use them to reconstruct 3D images of the finest cell structures or determine structure of proteins. Material scientists employ TEMs to routinely image specimens with atomic resolution, investigate surface properties or analyze nanostructures. Finally, the electron beam can be also focused on a narrow beam that is scanned through the sample in what is called Scanning Transmission Electron Microscopy (STEM).

We provide a wide range of SEMs and FIBs with a modular approach, where each electron or ion column can be mounted on up to 4 different chamber sizes (SB, LM, XM or GM). Additionally, each model comes in the high-vacuum version only (H) or the Univacuum version (U) capable of additionally operating in up to 500 Pa (optionally 2 000 Pa for some models) partial pressure of dry nitrogen or water vapor.


  • VEGA3: Thermionic source SEMs, with either W or LaB6 emitter
  • MIRA3: Field Emission SEMs, non-immersion lens
  • MAIA3: Field Emission SEMs with immersion lens
  • S8000: 4th Generation Field Emission SEMs, non-immersion lens


  • LYRA3: Ga LMIS with FE-SEM, non immersion
  • GAIA3: Ga LMIS with FE-SEM, immersion lens
  • FERA3: Plasma FIB with FE-SEM, non immersion
  • XEIA3: Plasma FIB with FE-SEM, immersion lens
  • S8000G: UHR Ga FIB, non immersion
  • S9000G: UHR Ga FIB, non immersion
  • NanoSpace: Ultra-High Vacuum FIB

Special SEMs

  • TIMA-X: Integrated Mineral Analyzer
  • MIRA3-AMU: An SEM with extraordinarily large chamber
  • RISE: Integration with Raman spectroscopy