PECS II

Gatan Precision Etching & Coating System (PECS II)

PECS II

The new PECS II system is the answer to challenges in SEM specimen preparation such as:

  • Debris and contamination from mechanical or electrochemical polishing
  • Large surface areas
  • Need for clean and uniform coating after polish, without breaking vacuum
  • Minimize preferential etching due to sample chemistry or hardness differences

The new PECS II features:

  • Low energy (range: 0.1 to 8.0 keV) ion polishing leaves neither debris nor contamination (minimal Ar ion implantation)
  • Large surface areas, up to 4 mm (yes, 4,000 µm!) radius
  • Polish and coat with a single pump down
  • No mechanical deformation, no chemical reactions, minimum preferential etching thanks to low glancing angle (±10°)
  • Options for liquid nitrogen cooling and digital zoom camera

The new PECS II is ideal for applications where a smooth, clean, uniform surface is essential:
  • EBSD mapping
  • Cathodoluminescence experiments
  • Minimize topography contrast on cross sections
  • Materials sensitive to oxygen or humidity

Ready to go from here…

PECS II BEFOREPECS II AFTER

... to a sample that is cleaner & smoother?

Technical Specifications

Ion source

Ion guns

Two penning ion guns with rare earth magnets

Milling angle

±10°, each gun independently adjustable

Ion beam energy (keV)

0.1 – 8.0

Ion current density peak (mA/cm2)

10

Milling rate on silicon (μm/h)

90

Beam diameter

Adjustable using gas flow controller or discharge voltage

Specimen stage

Sample size (D x H, mm)

32 x 15

Rotation (rpm)

1 – 6

Beam modulation

Single, double with adjustable range

Viewing

Digital zoom microscope with PC and DigitalMicrograph storage (optional)

Vacuum

Dry pumping system

Two stage diaphragm pump backing a 80 L/s turbo drag pump

Pressure (torr)

Base

5 x 10-6

Operating

8 x 10-5

Vacuum gauge

Cold cathode type for main chamber

Solid state for backing pump

Specimen airlock

WhisperLok technology

Specimen exchange time (min)

<1

User interface

10-inch color touch screen

Simple operation with complete control of all parameters and recipe operation

Dimensions and utilities

Overall size (L x W x H, mm)

575 x 495 x 615

Shipping weight (kg)

45

Power consumption (W)

During operation

200

Guns off

100

Power requirements with universal 100 – 240 VAC (Hz)

50 – 60

Argon gas (psi)

25

Specifications are subject to change.